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Sub-chambers are individually pumped to provide close control of sub-chamber pressures. Sources are activated and when the length of material is drawn past them the metal of the sources is deposited thereon. Each partition comprises two sealed parts, one of which moves with the web transport mechanism while the other remains in the vacuum chamber when the chamber is opened. This enables a close gap to be maintained between partitions and mechanism which in turn restricts gas leakage between adjacent sub-chambers.
Filed: April 5, Date of Patent: September 8, Inventor: Frank Casey. Justia Legal Resources. Find a Lawyer. Law Students. US Federal Law. US State Law. Other Databases. Michael J. Lissau , Employment Law-Management. James C. Nally , Corporate Law. Jerry R. Timothy S. Proszek , Communications Law. Stephen W. James M. Margaret A. Swimmer , Native American Law. Kenyon "Ken" Williams, Jr. Frank B. Oklahoma City Office.
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